Jaeger R.C. Introduction to Microelectronic Fabrication. Volume 5

2nd edition. — Prentice Hall, 2002. — 316 p. — ISBN 0201444941.Modular Series on Solid State DevicesThis introductory book assumes minimal knowledge of the existence of integrated circuits and of the terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors. It presents to readers the basic information necessary for more advanced processing and design books. Focuses mainly on the basic processes used in fabrication, including lithography, oxidation, diffusion, ion implantation, and thin film deposition. Covers interconnection technology, packaging, and yield. Appropriate for readers interested in the area of fabrication of solid state devices and integrated circuits.