Fujiwara H. Spectroscopic Ellipsometry: Principles and Applications

John Wiley & Sons Inc., 2007. - 370 p. (монография)Ellipsometry: Principles and Applications by Dr H. Fujiwara. It is a tutorial introduction, yet offers considerable depth into advanced topics such as generalized ellipsometry and advanced dispersion and oscillator models for analysis of complex materials systems. Each chapter is extremely well referenced, with over 400
literature citations in total, providing the reader rapid access to considerable published literature from fundamentals to recent advances. It is also well illustrated, with over 200 figures, making this an excellent possible textbook for teaching ellipsometry at both the beginning and intermediate to advanced levels. The book will be appropriate as a text in an educational institution. Equally it will be excellent to help educate and train researchers in institutes and industrial laboratories to learn practical applications of the technique.Recent developments in spectroscopic ellipsometry have further allowed the real-time characterization of film growth and evaluation of optical anisotropy. Consequently, spectroscopic ellipsometry has established its position as a high precision optical characterization technique, and more researchers in universities and companies have started using this technique.The key objective of this book is to provide a fundamental understanding for spectroscopic ellipsometry particularly for researchers who are not familiar with the ellipsometry technique. Although some aspects are complicated, the understanding of the ellipsometry technique is not essentially difficult, if one comprehends the principles in order. Based on this point of view, this book provides general descriptions for measurement and data analysis methods employed widely in spectroscopic ellipsometry. Since ellipsometry is quite a geometrical measurement method, various illustrations are included to help readers. To simplify descriptions,
unnecessary equations for electromagnetics and quantum mechanics have been eliminated. Instead, the derivations of important formulae used in spectroscopic ellipsometry are shown in this book.