Goldstein J., Newbury D. et al. Scanning electron microscopy and X-ray microanalysis

3 ed. , Kluwer, 2003, 689p.The SEM and Its Modes of Operation
Electron Beam Specimen Interactions
Image Formation and Interpretation
Special Topics in Scanning Electron Microscopy
Generation of X Rays in the SEM Specimen
X-Ray Spectral Measurement: EDS and WDS
Qualitative X-Ray Analysis
Quantitative X-Ray Analysis: The Basics
Special Topics in Electron Beam X-Ray Microanalysis
Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers
Specimen Preparation of Polymer Materials
Ambient-Temperature Specimen Preparation of Biological Material
Low-Temperature Specimen Preparation
Procedures for Elimination of Charging in Nonconducting Specimens