Celano U. (Ed.) Electrical Atomic Force Microscopy for Nanoelectronics

Springer, 2019. — 424 p. — (NanoScience and Technology). — ISBN: 978-3-030-15611-4.The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.The Atomic Force Microscopy for Nanoelectronics
Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides
Mapping Conductance and Carrier Distributions in Confined Three-Dimensional Transistor Structures
Scanning Capacitance Microscopy for Two-Dimensional Carrier Profiling of Semiconductor Devices
Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices
Characterizing Ferroelectricity with an Atomic Force Microscopy: An All-Around Technique
Electrical AFM for the Analysis of Resistive Switching
Magnetic Force Microscopy for Magnetic Recording and Devices
Space Charge at Nanoscale: Probing Injection and Dynamic Phenomena Under Dark/Light Configurations by Using KPFM and C-AFM
Conductive AFM of 2D Materials and Heterostructures for Nanoelectronics
Diamond Probes Technology
Scanning Microwave Impedance Microscopy (sMIM) in Electronic and Quantum Materials