Goldstein J.I., Newbury D.E., Michael J.R., Ritchie N.W.M., Scott J.H.J., Joy D.C. Scanning Electron Microscopy and X-Ray Microanalysis

4th Edition. — Springer Science+Business Media LLC, 2018. — 554 p. — ISBN: 149396674X.This thoroughly revised and updated Fourth Edition of a time-honored text provides the reader with a comprehensive introduction to the field of scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS) for elemental microanalysis, electron backscatter diffraction analysis (EBSD) for micro-crystallography and focused ion beams. Students and academic researchers will find the text to be an authoritative and scholarly resource, while SEM operators and a diversity of practitioners - engineers, technicians, physical and biological scientists, clinicians, and technical managers - will find that every chapter has been overhauled to meet the more practical needs of the technologist and working professional.
In a break with the past, this Fourth Edition de-emphasizes the design and physical operating basis of the instrumentation, including the electron sources, lenses, detectors, etc. In the modern SEM, many of the low level instrument parameters are now controlled and optimized by the microscope's software, and user access is restricted. Although the software control system provides efficient and reproducible microscopy and microanalysis, the user must understand the parameter space wherein choices are made to achieve effective andmeaningful microscopy, microanalysis, and micro-crystallography. Therefore, special emphasis is placed on beam energy, beam current, electron detector characteristics and controls, and ancillary techniques such as energy dispersive x-ray spectrometry (EDS) and electron backscatter diffraction (EBSD).Electron Beam—Specimen Interactions: Interaction Volume
Backscattered Electrons
Secondary Electrons
X-Rays
Scanning Electron Microscope (SEM) Instrumentation
Image Formation
SEM Image Interpretation
The Visibility of Features in SEM Images
Image Defects
High Resolution Imaging
Low Beam Energy SEM
Variable Pressure Scanning Electron Microscopy (VPSEM)
ImageJ and Fiji
SEM Imaging Checklist
SEM Case Studies
Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters
DTSA-II EDS Software
Qualitative Elemental Analysis by Energy Dispersive X-Ray Spectrometry
Quantitative Analysis: From k-ratio to Composition
Quantitative Analysis: The SEM/EDS Elemental Microanalysis k-ratio Procedure for Bulk Specimens, Step-by-Step
Trace Analysis by SEM/EDS
Low Beam Energy X-Ray Microanalysis
Analysis of Specimens with Special Geometry: Irregular Bulk Objects and Particles
Compositional Mapping
Attempting Electron-Excited X-Ray Microanalysis in the Variable Pressure Scanning Electron Microscope (VPSEM)
Energy Dispersive X-Ray Microanalysis Checklist
X-Ray Microanalysis Case Studies
Cathodoluminescence
Characterizing Crystalline Materials in the SEM
Focused Ion Beam Applications in the SEM Laboratory
Ion Beam Microscopy