Wiley-VCH, Weinheim, Germany, 2017 — 371 p. — ISBN: 3527340912.
The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale.
To provide a global perspective, the chapters are written by leading researchers and application scientists from all over the world and cover novel strategies, configurations and setups where new information will be obtained with the help of CAFM.
With its substantial content and logical structure, this is a valuable reference for researchers working with CAFM or planning to use it in their own fields of research.
Oxide Films and Conduction AFM
History and Status of the CAFM
Fabrication and Reliability of Conductive AFM Probes
Fundamentals of CAFM Operation Modes
Investigation of High-k Dielectric Stacks by C-AFM: Advantages, Limitations, and Possible Applications
Characterization of Grain Boundaries in Polycrystalline HfO2 Dielectrics
CAFM Studies on Individual GeSi Quantum Dots and Quantum Rings
Conductive Atomic ForceMicroscopy of Two-Dimensional Electron Systems: From AlGaN/GaN Heterostructures to Graphene and MoS2
Nanoscale Three-Dimensional Characterization with Scalpel SPM
Conductive Atomic Force Microscopy for Nanolithography Based on Local Anodic Oxidation
Combination of Semiconductor Parameter Analyzer and Conductive Atomic ForceMicroscope for Advanced Nanoelectronic Characterization
Design and Fabrication of a Logarithmic Amplifier for Scanning Probe Microscopes to AllowWide-Range Current Measurements
Enhanced Current Dynamic Range Using ResiScopeTM and Soft-ResiScope AFMModes
Multiprobe Electrical Measurements without Optical Interference
KPFM and its Use to Characterize the CPD in Different Materials
Hot Electron Nanoscopy and Spectroscopy (HENs)