Hlawacek G., Gölzhäuser A. (Eds.) Helium Ion Microscopy

Springer International Publishing, Switzerland, 2016. — 536 p. — (NanoScience and Technology) — ISBN: 9783319419886This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.Fundamentals
The Helium Ion Microscope
Single Atom Gas Field Ion Sources for Scanning Ion Microscopy
Structural Changes in 2D Materials Due to Scattering of Light Ions
Monte Carlo Simulations of Focused Ion Beam Induced Processing
Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging
Microscopy
Introduction to Imaging Techniques in the HIM
HIM of Biological Samples
HIM Applications in Combustion Science: Imaging of Catalyst Surfaces and Nascent Soot
Channeling and Backscatter Imaging
Helium Ion Microscopy of Carbon Nanomembranes
Helium Ion Microscopy for Two-Dimensional Materials
Analysis
Backscattering Spectrometry in the Helium Ion Microscope: Imaging Elemental Compositions on the nm Scale
SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics
Ionoluminescence
Direct–Write Milling and Deposition with Noble Gases
Resist Assisted Patterning
Focused Helium and Neon Ion Beam Modification of High-Tc Superconductors and Magnetic Materials
Helium Ion Microscope Fabrication of Solid-State Nanopore Devices for Biomolecule Analysis
Applications of GFIS in Semiconductors