ASTM F 84-99. Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe

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In: Annual Book of ASTM Standards vol. 10.04 (Electronics I), West Honshohoken, PA: ASTM Intl., 2001. - 13 p.
This test method covers the measurement of the resistivity of silicon wafers with a in-line four probe measurements.