ASTM F 26-87a. Test Methods for Determining the Orientation of a Semiconductive Single Crystal

In: Annual Book of ASTM Standards vol. 10.04 (Electronics I), West Honshohoken, PA: ASTM Intl., 2001. - 5 p. - Approved 1987, reapproved 1999.
These test methods cover techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low-index atomic plane in single crystals used primarily for semiconductor devices. Two test methods are covered:
Test Method A, X-Ray Diffraction Orientation.
Test Method B, Optical Orientation.