ASTM D 5127 - 07 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

American Society for Testing and Materials (ASTM). Current edition approved April 15, 2007. Published May 2007. Originally approved in 1990. Last previous edition approved in 1999 as D 5127 – 99. 5 p. This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Six classifications of water are described, including water for line widths as low as 0.09 micron. In all cases, the recommendations are for water at the point of distribution (POD).