Nakamura K. Photopolymers: Photoresist Materials, Processes, and Applications

CRC Press, Taylor & Francis, Boca Raton, FL, 2015, 173 pages, ISBN: 146651728XAdvancements in photopolymers have led to groundbreaking achievements in the electronics, print, optical engineering, and medical fields. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, printing plates, 3-D printing, microelectromechanical systems (MEMS), and medical materials. Processes such as photopolymerization, photodegradation, and photocrosslinking, as well as lithography technology in which photofabrications are performed by images of photopolymers, have given rise to very large-scale integrated (VLSI) circuits, microproducts, and more.Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, Photopolymers: Photoresist Materials, Processes, and Applications covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world’s largest corporations. Offering a state-of-the-art review of progress in the development of photopolymers, this book provides valuable insight into current and future opportunities for photopolymer use.Introduction

Basic Idea of PhotopolymerizationRadical Polymerization
Monomers for Photopolymerization
Initiators of Photopolymerization
Inhibition of Polymerization
Cationic Photopolymerization
Photocrosslinking
Scission of PolymersChemically Amplified ResistsChemical Amplification of Photopolymers
Polymers for Chemical Amplification
Photoacid GeneratorProcess of Chemically Amplified ResistsProgress of Resolution Limit
Immersion Lithography
Double Patterning
EUV Lithography
Direct Self-Assembly (DSA)NanoimprintThermal Nanoimprint
UV Nanoimprint
Cationic Polymerization of UV Nanoimprint
Ene-Thiol Polymerization of UV Nanoimprint
Soft LithographyIndustrial Application of PhotopolymersApplication to Electronics
Optical Adhesive Polymers
Holographic Photopolymers
Application to Medical Materials
Microelectromechanical Systems (MEMSs)