Liu Q., Duan X., Peng C. Novel Optical Technologies for Nanofabrication

Springer, 2014. — 274 p.Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques.Super-Resolution Laser Direct Writing and Its Applications
Laser Path-Guided Wrinkle Structures
Laser Micro-/Nanofabrication and Applications Based on Multiphoton Process
Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons
Mass Production of Large-Format Micro-/Nanostructure-Based Optical Devices